Expanding techniques for chip-scale acoustic wave focusing would open doors for advancements in signal processing and quantum electromechanical microsystems. In this paper, we present a method for acoustic wave focusing and wavefront shaping at radio frequencies (RF), validated with thin-film lithium niobite on a low-loss and high coupling silicon carbide (LiNbO3-on-SiC) testbed. By depositing a metal layer, we can mitigate the piezoelectric stiffening effect, and reduce the acoustic wave speed in a patterned area. Employing a design analogous to geometric optical systems, efficient acoustic wave focusing is experimentally observed. With more development, this technique could be employed in emerging acoustic microsystems.

2022 IEEE MTT-S International Conference on Microwave Acoustics and Mechanics (IC-MAM)