SAW Resonators on 15°YX-LiNbO $_\textrm3$ /SiO $_\textrm2$ /Sapphire Substrate with Excellent Electromechanical Coupling
Author
Abstract

In this work, the shear horizontal surface acoustic wave (SH-SAW) resonators were demonstrated on 15° YXLiNbO3/SiO2/sapphire (LiNbO3-on-sapphire, LNOS) substrate. Compared to the reported gigahertz SAW resonators based on piezoelectric heterogeneous substrates, the fabricated resonator in this work exhibits a state-of-the-art electromechanical coupling coefficient (k2) of 42.2\%, a maximum Bode-Q (Qmax) of 1457 and an excellent figure of merit (k2×Qmax) of 615. Besides, several methods for suppressing transverse modes were implemented and compared. Tilted interdigital-transducers combined with the apodization technique can suppress the transverse modes more thoroughly while maintaining decent Q values. Overall, SAW devices based on the LNOS substrate have great potential for RF filters with low insertion loss, steep skirts, and wide bandwidth.

Year of Publication
2023
Date Published
may
Publisher
IEEE
Conference Location
Toyama, Japan
ISBN Number
9798350311426
URL
https://ieeexplore.ieee.org/document/10272189/
DOI
10.1109/EFTF/IFCS57587.2023.10272189
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