Ali, T. ., Olivo, R. ., Kerdilès, S. ., Lehninger, D. ., Lederer, M. ., Sourav, D. ., … Seidel, K. . (2022). Study of Nanosecond Laser Annealing on Silicon Doped Hafnium Oxide Film Crystallization and Capacitor Reliability. In 2022 IEEE International Memory Workshop (IMW) (pp. 1–4).
First name
K.
Last name
Kühnel