First name
T.
Last name
Kämpfe
Ali, T., Olivo, R., Kerdilès, S., Lehninger, D., Lederer, M., Sourav, D., … Seidel, K. (2022). Study of Nanosecond Laser Annealing on Silicon Doped Hafnium Oxide Film Crystallization and Capacitor Reliability. In 2022 IEEE International Memory Workshop (IMW) (pp. 1–4).