Qi, C., Nagai, K., Ji, M., Miyahara, Y., Sugita, N., Shinshi, T., … Sato, C. (2022). A Magnetic Actuator Using PLD-made FePt Thick Film as a Permanent Magnet and Membrane Material for Bi-directional Micropumps. In 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS) (pp. 309–310).