First name
Masaki
Last name
Nakano
Qi, C. ., Nagai, K. ., Ji, M. ., Miyahara, Y. ., Sugita, N. ., Shinshi, T. ., … Sato, C. . (2022). A Magnetic Actuator Using PLD-made FePt Thick Film as a Permanent Magnet and Membrane Material for Bi-directional Micropumps. In 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS) (pp. 309–310).