Author
Abstract

This work proposes a novel one-port 3D acoustic resonator based on the lithium niobate thin film on conductive silicon carbide substrate (LiNbO3-on-SiC, LNCSiC). The fabricated resonator shows coupled frequency responses of the shear-horizontal surface acoustic wave (SH-SAW), the longitudinal leaky SAW (LL-SAW), and the high-overtone bulk acoustic waves (HBAWs). The HBAWs propagating in the thickness direction of LNCSiC show a wide frequency response span exceeding 4 GHz and an excellent maximum quality factor ( ) of 7980. The GHz SH-SAW propagating in the surface of LNCSiC show a large electromechanical coupling coefficient ( ) of 25.95\%, while the LL-SAW shows an extremely high velocity of \textasciitilde6900 m/s. Such hybrid resonators could potentially open up new applications in radio frequency communications, 3D imaging, and sensing.

Year of Publication
2023
Date Published
01/2023
Publisher
IEEE
Conference Location
Munich, Germany
ISBN Number
978-1-66549-308-6
URL
https://ieeexplore.ieee.org/document/10052578/
DOI
10.1109/MEMS49605.2023.10052578
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