Solidly mounted resonators (SMRs) built on dielectric acoustic reflectors can save several fabrication steps as well as avoid undesired parasitic effects when exciting extended electrodes via capacitive coupling. In this work we manufacture and measure the frequency response of AlN-based SMRs built on 7-layer ZnO/SiO2 acoustic reflectors with SiO2 working as low impedance material and ZnO as high impedance material. After applying a 700°C treatment, their frequency response is measured again and compared with the pre-treatment measurements.

2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS)