3D Hybrid Acoustic Resonator with Coupled Frequency Responses of Surface Acoustic Wave and Bulk Acoustic Wave
Author
Abstract

This work proposes a novel one-port 3D acoustic resonator based on the lithium niobate thin film on conductive silicon carbide substrate (LiNbO3-on-SiC, LNCSiC). The fabricated resonator shows coupled frequency responses of the shear-horizontal surface acoustic wave (SH-SAW), the longitudinal leaky SAW (LL-SAW), and the high-overtone bulk acoustic waves (HBAWs). The HBAWs propagating in the thickness direction of LNCSiC show a wide frequency response span exceeding 4 GHz and an excellent maximum quality factor ( ) of 7980. The GHz SH-SAW propagating in the surface of LNCSiC show a large electromechanical coupling coefficient ( ) of 25.95\%, while the LL-SAW shows an extremely high velocity of \textasciitilde6900 m/s. Such hybrid resonators could potentially open up new applications in radio frequency communications, 3D imaging, and sensing.

Year of Publication
2023
Date Published
jan
Publisher
IEEE
Conference Location
Munich, Germany
ISBN Number
978-1-66549-308-6
URL
https://ieeexplore.ieee.org/document/10052578/
DOI
10.1109/MEMS49605.2023.10052578
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