| Acoustic Coupling and Remote Excitation in an Array of Multi-Mode Piezoelectric Micromachined Ultrasonic Transducers | |
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| Author | |
| Abstract |
This paper investigates acoustic cross-coupling and remote excitation in an array of PMUTs (piezoelectric micromachined ultrasound transducers). Though undesired cross-talk can impact on PMUT array performance, the same can be also employed for remote excitation. The device array under study comprises of 7 PMUTs with constant pitch which is designed and characterized at the fundamental and higher order modes. The insights are employed to demonstrate a remote frequency filter and dual-channel excitation employing acoustic coupling. |
| Year of Publication |
2023
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| Date Published |
may
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| Publisher |
IEEE
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| Conference Location |
Toyama, Japan
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| ISBN Number |
9798350311426
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| URL |
https://ieeexplore.ieee.org/document/10272082/
|
| DOI |
10.1109/EFTF/IFCS57587.2023.10272082
|
| Google Scholar | BibTeX | DOI | |