A fingerprint architecture based on a micro electro mechanical system (MEMS) for the use as a hardware security component is presented. The MEMS serves as a physically unclonable function (PUF) and is used for fingerprint ID generation, derived from the MEMS-specific parameters. The fingerprint is intended to allow the unique identifiability of electronic components and thus to ensure protection against unauthorized replacement or manipulation. The MEMS chip consists of 16 individual varactors with continuously adjustable capacitance values that are used for bit derivation (“analog” PUF). The focus is on the design-related forcing of random technological spread to provide a wide range of different parameters per chip or wafer to achieve a maximum key length. Key generation and verification is carried out via fingerprint electronics connected to the MEMS, which is realized by an FPGA.