Wu, S. ., Wu, Z. ., Qian, H. ., Bao, F. ., Tang, G. ., Xu, F. ., & Zou, J. . (2023). TCF-Improved SH $_\textrm0$ Mode Acoustic Resonators Based on 30°YX-LINBO $_\textrm3$ /SIO $_\textrm2$ Membrane. In (pp. 631–634). Munich, Germany: IEEE. http://doi.org/10.1109/MEMS49605.2023.10052518 (Original work published 2024)
First name
Shuxian
Last name
Wu