TCF-Improved SH $_\textrm0$ Mode Acoustic Resonators Based on 30°YX-LINBO $_\textrm3$ /SIO $_\textrm2$ Membrane
Author
Abstract

In this paper, a 30° YX-Lithium Niobate (LN) 0-th shear horizontal (SH0) plate acoustic wave (PAW) resonator is proposed. The SH0 mode characteristics the superiority of interdigital transducer (IDT) in the frequency definition over most other plate modes. Using finite element analysis method, the rotation angle of LN and the thickness of each layer were optimized for large effective coupling coefficient (k2eff) and high acoustic velocity. The rotation angle and the thickness of LN membrane are optimized as 30° and 0.2, respectively. To improve the temperature stability of proposed PAW resonators, a SiO2 film are added and the thickness is designed as 0.2. The measurement results derived a k2eff of 25.1\%, a Bode-Qmax of 604, and a Figure of merit (FoM) of 151, which is higher than the reported similar-type PAW resonators. The measured first-order temperature coefficients of frequency at resonant frequency (TCFfs) and anti-resonant frequency (TCFfp) are -38ppm/°C and -26ppm/°C, suggesting the temperature stability improvement in comparison with only LN membrane-based resonators.

Year of Publication
2023
Date Published
jan
Publisher
IEEE
Conference Location
Munich, Germany
ISBN Number
978-1-66549-308-6
URL
https://ieeexplore.ieee.org/document/10052518/
DOI
10.1109/MEMS49605.2023.10052518
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